Pall's Gaskleen Top Mount (TM) filter assemblies are designed for ≥ 3 nanometer filtration of semiconductor process gases. The top mount filter is well-suited for integrated gas delivery systems, providing easy access and change.

• Electropolished 316L stainless steel housing
• State-of-the-art 316L stainless steel filter medium
• High temperature and pressure capabilities
• Excellent gas displacement and desorption characteristics
• 100% helium leak tested
• Manufactured and packaged in a cleanroom environment
• Available with a 1⁄4˝ VCR1 port on top of assembly for a pressure gauge or other component
• Improved corrosion resistance using Pall’s proprietary process


For detailed information about this product, please refer to the data sheet. (To download this data sheet, select Download PDF in the left sidebar.)