The Pall Ultipleat ME filter is engineered to provide the highest flow rates for deep sub-micron filtration of today's HF and BOE recirculation bath processes. The unique combination of Pall's proprietary highly asymmetric membrane morphology and crescent shaped Ultipleat filter design enables an almost 50% increase in flow rates over previous designs.
This breakthrough technology synergy allows the finest filtration possible with minimal demand on limited pumping capacity. The result is fast starts, improved particle retention, reduced microbubble potential and improved bath quality.
• Excellent retention characteristics
• Very high flow rates
• Rapid Bath Turnover
• Low extractables
• Ultra low metal ion extractables option
• 100% integrity tested
• No prewetting with IPA required
• Manufactured in a cleanroom environment