DFA™ Filter Assembly (Chemical Filtration)
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The DFA filter assembly is a compact capsule assembly. It is ideally suited for the filtration of developer, EBR, and DI water, as well as for small volume batch processing.
- Low hold-up volume
- Vent at highest location
- Drain at lowest location
- High flow rates
- Manufactured in a cleanroom environment
- O-ringless design
- Minimized dead space for complete
and easy venting
Materials
P-Nylon Filter
- Medium: Hydrophilic nylon 6,6
- Shell, core, cage, and end caps: Polypropylene
- Support and drainage: High Density Polyethylene (HDPE)
Emflon® Filter
- Medium: Hydrophobic PTFE
- Shell, core, cage, and end caps: Polypropylene
- Support and drainage: Polypropylene
Ultipor® Filter
- Medium: Hydrophilic nylon 6,6
- Shell, core, cage, and end caps: Polypropylene
- Support and drainage: Polypropylene
Fluorodyne® Filter
- Medium: Hydrophilic PVDF
- Shell, core, cage, and end caps: Polypropylene
- Support and drainage: Polypropylene
Asymmetric P-Nylon Filter
- Medium: Hydrophilic nylon 6,6
- Shell, core, cage, and end caps: Polypropylene
- Support and drainage: High Density Polyethylene (HDPE)
PE Kleen Filter
- Medium: Hydrophobic High Density Polyethylene (HDPE)
- Shell, core, cage, and end caps: Polypropylene
- Support and drainage: High Density Polyethylene (HDPE)
Removal Ratings
- P-Nylon filter: 0.1 μm, 40 nm
- Emflon filter: 0.2 μm, 0.1 μm, 0.05 μm
- Ultipor filter: 0.2 μm, 0.1 μm
- Fluorodyne filter: 0.2 μm, 0.1 μm
- PE-Kleen filter:
- 1.0 μm
- 0.15 μm
- 0.07 μm
- 0.05 μm
- 30 nm
- 10 nm
- Asymmetric P-Nylon filter: 40 nm, 20 nm
Connections
Inlet, outlet / vent, drain- 1⁄4 in. NPT / 1⁄8 in. NPT
- 3⁄8 in. Swagelok1 / 1⁄4 in. Swagelok
- 6 mm Pillarfitting2 / 4 mm Pillarfitting
- 8 mm Pillarfitting / 4 mm Pillarfitting
- 1⁄4 in. Pillarfitting / 1⁄4 in. Pillarfitting
- 3⁄8 in. flare style / 1⁄4 in. flare style
- 3⁄8 in. Pillarfitting / 1⁄4 in. Pillarfitting
Operating Conditions
Maximum operating pressure:- 0.5 MPa (75 psid) @ 38 °C (100 °F)
1 Swagelok is a trademark of Swagelok Co.
2 Pillarfitting is a trademark of Nippon Pillar Packing Co., Ltd.
Pressure Drop vs. Liquid Flow Rate3
3 For liquids with a different viscosity from water, multiply the pressure drop by the viscosity in centipoise.
Dimensions
4 Other membrane filter materials are available.
Part Numbers / Ordering Information
| Part Number | Removal Rating | Connections Inlet, Outlet / Vent, Drain |
Nominal Length (L) (mm / in.) | |
| Emflon Filter (PTFE Media / Polypropylene Support and Drainage Layer) | ||||
| DFA1FRESSW44 | 0.2 μm | 1300 / 200 | 1⁄4 in. Swagelok / 1⁄4 in. Swagelok | 114.5 / 4.51 |
| DFA4201FRES | 0.2 μm | 1300 / 200 | 1⁄4 in. NPT / 1⁄8 in. NPT | 114.5 / 4.51 |
| DFA1FTESNP64M | 0.1 μm | 1300 / 200 | 6 mm Pillarfitting / 4 mm Pillarfitting | 116.8 / 4.60 |
| DFA1FTESNP84M | 0.1 μm | 1300 / 200 | 8 mm Pillarfitting / 4 mm Pillarfitting | 121 / 4.76 |
| DFA4201FTES | 0.1 μm | 1300 / 200 | 1⁄4 in. NPT / 1⁄8 in. NPT | 114.5 / 4.51 |
| DFA6402FTES | 0.1 μm | 2600 / 400 | 3⁄8 in. Swagelok / 1⁄4 in. Swagelok | 173 / 6.80 |
| DFA1FDESNP64M | 0.05 μm | 1300 / 200 | 6 mm Pillarfitting / 4 mm Pillarfitting | 116.8 / 4.60 |
| DFA1FDESNP84M | 0.05 μm | 1300 / 200 | 8 mm Pillarfitting / 4 mm Pillarfitting | 121 / 4.76 |
| DFA4201FDES | 0.05 μm | 1300 / 200 | 1⁄4 in. NPT / 1⁄8 in. NPT | 114.5 / 4.51 |
| DFA6402FDE | 0.05 μm | 2600 / 400 | 3⁄8 in. Swagelok / 1⁄4 in. Swagelok | 173 / 6.80 |
| DFA6402FDES | 0.05 μm | 2600 / 400 | 3⁄8 in. Swagelok / 1⁄4 in. Swagelok | 173 / 6.80 |
| Asymmetric P-Nylon Filter (Asymmetric Nylon 6,6 Media / HDPE Support and Drainage) | ||||
| DFA1ANDENP64M | 40 nm | 2500 / 388 | 6 mm Pillarfitting / 4 mm Pillarfitting | 116.8 / 4.60 |
| DFA6402ANDE | 40 nm | 5300 / 822 | 3⁄8 in. Swagelok / 1⁄4 in. Swagelok | 173 / 6.80 |
| DFA2ANDEFL64 | 40 nm | 5300 / 822 | 3⁄8 in. flare style / 1⁄4 in. flare style | 214.5 / 8.40 |
| DFA2ANDENP64R | 40 nm | 5300 / 822 | 3⁄8 in. Pillarfitting / 1⁄4 in. Pillarfitting | 194 / 7.62 |
| DFA1ANMENP64M | 20 nm | 2500 / 388 | 6 mm Pillarfitting / 4 mm Pillarfitting | 116.8 / 4.60 |
| DFA2ANMENP64R | 20 nm | 5300 / 822 | 3⁄8 in. Pillarfitting / 1⁄4 in. Pillarfitting | 194 / 7.62 |
| DFA6402ANME | 20 nm | 5300 / 822 | 3⁄8 in. Swagelok / 1⁄4 in. Swagelok | 173 / 6.80 |
| P-Nylon Filter (Nylon 6,6 Media / HDPE Support and Drainage Layer) | ||||
| DFA4201UNAE | 0.2 μm | 1800 / 279 | 1⁄4 in. NPT / 1⁄8 in. NPT | 114.5 / 4.51 |
| DFA4201UNIE | 0.1 μm | 1800 / 279 | 1⁄4 in. NPT / 1⁄8 in. NPT | 114.5 / 4.51 |
| DFA1UNIENP64M | 0.1 μm | 1800 / 279 | 6 mm Pillarfitting / 4 mm Pillarfitting | 116.8 / 4.60 |
| DFA1UNIENP84M | 0.1 μm | 1800 / 279 | 8 mm Pillarfitting / 4 mm Pillarfitting | 121 / 4.76 |
| DFA6402UNIE | 0.1 μm | 3700 / 574 | 3⁄8 in. Swagelok / 1⁄4 in. Swagelok | 173 / 6.80 |
| DFA4201UNIE | 0.1 μm | 1800 / 279 | 1⁄4 in. NPT / 1⁄8 in. NPT | 114.5 / 4.51 |
| DFA2UNIEFL64 | 0.1 μm | 3700 / 574 | 3⁄8 in. flare style / 1⁄4 in. flare style | 214.5 / 8.40 |
| DFA1UNDENP64M | 40 nm | 2200 / 341 | 6 mm Pillarfitting / 4 mm Pillarfitting | 116.8 / 4.60 |
| DFA1UNDNP84M | 40 nm | 2200 / 341 | 8 mm Pillarfitting / 4 mm Pillarfitting | 121 / 4.76 |
| DFA6402UNDE | 40 nm | 4600 / 713 | 3⁄8 in. Swagelok / 1⁄4 in. Swagelok | 173 / 6.80 |
| DFA2UNDEFL64 | 40 nm | 4600 / 713 | 3⁄8 in. flare style / 1⁄4 in. flare style | 214.5 / 8.40 |
| DFA2UNDENP64R | 40 nm | 4600 / 713 | 3⁄8 in. Pillar / 1⁄4 in. Pillar | 194 / 7.62 |
| DFA2UNDENP84M | 40 nm | 4600 / 713 | 8 mm Pillar / 4 mm Pillar | 199 / 7.83 |
| Ultipor Filter (Nylon 6,6 Media / Polypropylene Support and Drainage Layer) | ||||
| DFA1NAEYSW44 | 0.2 μm | 1390 / 215 | 1⁄4 in. Swagelok / 1⁄4 in. Swagelok | 114.5 / 4.51 |
| DFA6402NAEY | 0.2 μm | 2600 / 400 | 3⁄8 in. Swagelok / 1⁄4 in. Swagelok | 173 / 6.80 |
| DFA1NIEYNP64M | 0.1 μm | 1390 / 215 | 6 mm Pillarfitting / 4 mm Pillarfitting | 116.8 / 4.60 |
| DFA1NIEYNP84M | 0.1 μm | 1390 / 215 | 8 mm Pillarfitting / 4 mm Pillarfitting | 121 / 4.76 |
| DFA1NIEYSW44 | 0.1 μm | 1390 / 215 | 1⁄4 in. Swagelok / 1⁄4 in. Swagelok | 114.5 / 4.51 |
| DFA6402NIEY | 0.1 μm | 2600 / 400 | 3⁄8 in. Swagelok / 1⁄4 in. Swagelok | 173 / 6.80 |
| Fluorodyne Filter (PVDF Media / Polypropylene Support and Drainage Layer) | ||||
| DFA4201V002EY | 0.2 μm | 1300 / 202 | 1⁄4 in. NPT / 1⁄8 in. NPT | 114.5 / 4.51 |
| DFA4201V001EY | 0.1 μm | 1300 / 202 | 1⁄4 in. NPT / 1⁄8 in. NPT | 114.5 / 4.51 |
| DFA1V001EYSW44 | 0.1 μm | 1300 / 202 | 1⁄4 in. Swagelok / 1⁄4 in. Swagelok | 114.5 / 4.51 |
| PE Kleen Filter (HDPE Media / HDPE Support and Drainage Layer) | ||||
| DFA6402UG100E | 1.0 μm | 4400 / 682 | 3⁄8 in. Swagelok / 1⁄4 in. Swagelok | 173 / 6.80 |
| DFA4201UG015E | 0.15 μm | 2200 / 341 | 1⁄4 in. NPT / 1⁄8 in. NPT | 114.5 / 4.51 |
| DFA4201UG007E | 0.07 μm | 2200 / 341 | 1⁄4 in. NPT / 1⁄8 in. NPT | 114.5 / 4.51 |
| DFA6402UG007E | 0.07 μm | 4400 / 682 | 3⁄8 in. Swagelok / 1⁄4 in. Swagelok | 173 / 6.80 |
| DFA4201UG005E | 0.05 μm | 2200 / 341 | 1⁄4 in. NPT / 1⁄8 in. NPT | 114.5 / 4.51 |
| DFA6402UG005E | 0.05 μm | 4400 / 682 | 3⁄8 in. Swagelok / 1⁄4 in. Swagelok | 173 / 6.80 |
| DFA6402UG003E | 30 nm | 4400 / 682 | 3⁄8 in. Swagelok / 1⁄4 in. Swagelok | 173 / 6.80 |
| DFA2UG001EFL64 | 10 nm | 5100 / 791 | 3⁄8 in. flare style / 1⁄4 in. flare style | 214.5 / 8.40 |