Gas Filtration Application Literature for Semiconductor Manufacturing

Title Sub
Process(es)
of Interest
Process
Improvements
Business
Benefits
Products
Covered
Application
Bulletins
Maintaining Ultra High Pure Gas Delivery Systems
by Installing Pall Gas Filter Assemblies
 (PDF)
N/A
  • Consistent purity levels
  • Eliminate any significant amount of water and oxygen contamination from outgassing into gas delivery systems
  • Fast pump downtimes of the vacuum chamber,
    translating to faster process cycle times
  • Reduced total cost of ownership
Preventing Particles on Wafers by Installing
the Pall ChamberKleen Diffuser
 (PDF)
N/A
  • Shorter purge cycle
  • Increased tool and process throughput
  • Reduce flow turbulence
  • Lower wafer particle defects
  • Reduced total cost of ownership

Removing Particulate Contamination in Ultra High Pure
Gas Delivery Systems by Installing Pall Gas Filters
 (PDF)

  • Direct Interception
  • Intertial Impactions
  • Diffusional Interception
  • Removal of small and large size particles
  • Reduced total cost of ownership
Technical and Published Articles

Performance Characteristics of Pall Ultramet-L® Filters

     
Recommended Change-Out Schedule for
Electronic Grade Gas Filters
  • Plasma etching of polysilicon
  • Diffusion furnace cleaning
  • Oxidation processes
N/A N/A
Reducing system Footprint and operational Costs
through Careful Component Selection
 (PDF)
  • Plasma etch process
  • Increased flow rates with minimal impact on the system footprint
  • Reduced system footprint
  • Remove harmful contaminants
  • Reduce number of calibrations
  • Removal of metal carbonyl complexes
  • Removal of harmful moisture impurities
  • Longer on-stream life
  • Fewer changeouts
  • Eliminates the need for additional heat sources
  • Capital and maintenance cost reduction
  • Increased uptime
  • Increased yield
  • Avoid additional capital, energy and maintenance expenses
Selection of 316L Stainless Steel for High Purity
Semiconductor Gas Filter Assemblies
N/A
  • Remove particulate contamination
N/A
  • All Gaskleen and Ultramet-L Filter Assemblies
Use of Fluropolymer and All-Stainless Steel Filters
in Ultraclean Gas Distribution Systems
N/A
  • Remove particulate contamination
  • Minimize outgassing
N/A
Use of Nickel and 316L Stainless Steel Filter
Assemblies in High Purity Corrosive Gas Distribution Systems
N/A
  • Improve the corrosion resistance in UHP gas systems
N/A