ChamberKleen™ Diffusers – NW40/NW50

ChamberKleen diffusers are ideally suited for vent applications on load lock interfaces or other vacuum chambers where large volumes of gas are flowing in a short amount of time.

Features

• Reduced turbulent flow during venting of process chambers
• High differential pressure capability
• 316L stainless steel housing
• Filters wide variety of gases
• Cleanroom manufactured and packaged

Materials	316 L SS filter and housing ≤ 0.51 μm / 20 μin Ra wetted surface finish Fluorocarbon o-ring
Particle Removal Rating	>≥ 3 nm Particle contribution above background: particle / (m3 or ft3) ≥ 0.01 μm at 75 slpm
Connections	1/4" Gasket seal inlet (VCR1 or compatible) I40: NW40 ISO vacuum flange* I50: NW50 ISO vacuum flange* *Compatible with standard ISO bulkhead clamps
Maximum Vent-Up Cycles	100,000 cycles at maximum differential pressure: 0.7 MPa @ 20°C / 105 psid @ 68°F
Operating Conditions	Maximum allowable differential pressure 0.7 MPa @ 20°C / 105 psid @ 68°F Maximum operating temperature: 100°C / 212°F (o-ring limited)
Design Flow Rate	75 slpm

Pressure Drop vs. Gas Flow Rate

Pressure vs. Chamber Fill Time

Dimensions