Wastewater Treatment for Semiconductor Manufacturing

The semiconductor industry not only consumes an ever-increasing amount of water but, as a consequence, also ends up discharging large volumes of wastewater.

Industrial water consumption, as well as environmental pollution, is being closely monitored by regulatory agencies who are demanding that water consumption be reduced and that discharged wastewater have low levels of suspended solids.

In many places, moreover, expansion of production is restricted due to a limited supply of water. Furthermore, the increasing cost of water, together with fines and surcharges for excessive consumption or discharge, is of growing importance as "green" initiatives gain momentum.
Among the processes requiring large quantities of water and producing significant amounts of wastewater are:

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Click to expand/collapse this sectionChemical Mechanical Polishing (CMP)
Click to expand/collapse this sectionSilicon Backgrinding and Dicing