DFA™-EZ Filter Assembly (CMP)

The DFA^™-EZ compact filter capsule assembly is designed for small volume processing. The configuration allows for quick, safe and simple filter change-outs and easy maintenance. It is ideally suited for point-of-use filtration of photoresists, various slurries and other compatible liquids.

• In-line flow path with minimal dead space
• One-step quick disconnect filter replacement
• The Profile^® depth filter media is ideally suited for the removal of gels, aggregates and oversize particles
• Capsule design prevents incorrect orientation and installation
• Nozzle connections can be readily removed for cleaning
• Compact size
• Ease of use minimizes down-time
• Minimizes operator exposure to solvents
• Small footprint permits installation in narrow confines

¹ This product is only available in Asia.

For detailed information about this product, please refer to the data sheet. (To download this data sheet, select Download PDF from the menu above.)