%PDF-1.5
%
148 0 obj
<>/Metadata 183 0 R/Pages 145 0 R/StructTreeRoot 46 0 R/Type/Catalog>>
endobj
183 0 obj
<>stream
8.75
6.75
11
2017-03-10T07:00:34.768-05:00
Microsoft® Word 2010
marys
593d3eb6b37085d0f1dd267a804e5ce62bb406b9
366464
Microsoft® Word 2010
2016-04-12T14:08:27.000+09:00
2016-04-12T01:08:27.000-04:00
2016-04-11T17:05:41.000-04:00
application/pdf
2017-03-24T15:36:03.542-04:00
marys
Dendrimer-SPIE-Proceedings-Manuscript-2016.pdf
An Ultrasensitive Bio-surrogate for Nanoporous Filter Membrane Performance Metrology Directed towards Contamination Control in Microlithography Applications
uuid:da3b4a6f-6d09-40c5-a86a-a6410da9c8cc
uuid:3ae5a768-9e8e-463b-9d57-3055cd6c0efd
Microsoft® Word 2010
pall:assets/brochure
pall:Industry/Microelectronics
endstream
endobj
145 0 obj
<>
endobj
46 0 obj
<>
endobj
47 0 obj
<>
endobj
48 0 obj
<>
endobj
49 0 obj
[71 0 R 72 0 R 73 0 R 73 0 R 73 0 R 73 0 R 73 0 R 73 0 R 73 0 R 73 0 R 73 0 R 73 0 R 73 0 R 73 0 R 73 0 R 73 0 R 73 0 R 73 0 R 73 0 R 73 0 R 73 0 R 74 0 R 75 0 R 76 0 R 77 0 R 78 0 R 79 0 R 80 0 R]
endobj
50 0 obj
[81 0 R 81 0 R 81 0 R 81 0 R 81 0 R 81 0 R 81 0 R 81 0 R 81 0 R 81 0 R 81 0 R 81 0 R 81 0 R 81 0 R 81 0 R 81 0 R 81 0 R 81 0 R 81 0 R 81 0 R 81 0 R 81 0 R 81 0 R 81 0 R 81 0 R 81 0 R 81 0 R 81 0 R 81 0 R 81 0 R 81 0 R 81 0 R 81 0 R 81 0 R 81 0 R 81 0 R 81 0 R 81 0 R 81 0 R 81 0 R 81 0 R 81 0 R 81 0 R 81 0 R 81 0 R 81 0 R 81 0 R 81 0 R 81 0 R 81 0 R 81 0 R 81 0 R 81 0 R 81 0 R 81 0 R 81 0 R 81 0 R 81 0 R 81 0 R 81 0 R 81 0 R 81 0 R 81 0 R 81 0 R 81 0 R 82 0 R 83 0 R 84 0 R]
endobj
51 0 obj
[85 0 R 86 0 R 86 0 R 86 0 R 86 0 R 86 0 R 86 0 R 86 0 R 86 0 R 86 0 R 86 0 R 86 0 R 86 0 R 86 0 R 86 0 R 86 0 R 86 0 R 86 0 R 86 0 R 86 0 R 86 0 R 86 0 R 86 0 R 86 0 R 86 0 R 86 0 R 86 0 R 86 0 R 86 0 R 86 0 R 86 0 R 86 0 R 86 0 R 87 0 R 87 0 R 87 0 R 87 0 R 87 0 R 87 0 R 87 0 R 87 0 R 87 0 R 87 0 R 87 0 R 87 0 R 87 0 R 87 0 R 87 0 R 87 0 R 87 0 R 87 0 R 87 0 R 87 0 R 87 0 R 87 0 R 87 0 R 87 0 R 87 0 R 87 0 R 87 0 R 87 0 R 87 0 R 87 0 R 87 0 R 87 0 R 87 0 R 87 0 R 87 0 R 87 0 R 87 0 R 87 0 R 87 0 R 87 0 R 88 0 R 89 0 R 90 0 R 91 0 R 92 0 R]
endobj
52 0 obj
[93 0 R 94 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 95 0 R 96 0 R]
endobj
53 0 obj
[140 0 R 139 0 R 98 0 R 99 0 R 100 0 R 101 0 R]
endobj
54 0 obj
[138 0 R 137 0 R 103 0 R 104 0 R 105 0 R 106 0 R 107 0 R]
endobj
55 0 obj
[108 0 R 136 0 R 135 0 R 110 0 R 111 0 R 112 0 R 113 0 R 114 0 R]
endobj
56 0 obj
[134 0 R 133 0 R 116 0 R 117 0 R 118 0 R 119 0 R]
endobj
57 0 obj
[132 0 R 131 0 R 121 0 R 122 0 R 123 0 R]
endobj
58 0 obj
[124 0 R 130 0 R 129 0 R 126 0 R 127 0 R 128 0 R]
endobj
59 0 obj
[60 0 R 61 0 R 62 0 R 63 0 R 64 0 R 65 0 R 66 0 R 67 0 R]
endobj
60 0 obj
<>
endobj
61 0 obj
<>
endobj
62 0 obj
<>
endobj
63 0 obj
<>
endobj
64 0 obj
<>
endobj
65 0 obj
<>
endobj
66 0 obj
<>
endobj
67 0 obj
<>
endobj
68 0 obj
<>
endobj
26 0 obj
<>/MediaBox[0 0 486 630]/Parent 145 0 R/Resources<>/ProcSet[/PDF/Text/ImageB/ImageC/ImageI]>>/Rotate 0/StructParents 10/Tabs/S/Type/Page>>
endobj
27 0 obj
<>stream
x[[or~7GN`ӳ1bY$v(Y$ڛu8CQ\tiY,wONwnu=o'_|\|^ܮa;O.'g_߾9!'_ouĊo4[_߾ }ScjM\IWJd:]^c'jM>|:a{?,9quMWwJ]5u5sLM/+Mk{I%6ZW33}>ᬚWض~VǺ2mm%e _4TV-<j3swi,pUI;ntE:qЩ
DnR
FzMm۲JO+Ѳv $O&Y;U7;oѵ+9y4gjo}]̀mI'5BS38e[E۹u)OPz\2]?ukM-^a6ھeRNysL晘mMS;G x[;$n&L3CBD -r[ā%vJbQGgQ ?qRؐ(,KA5GhEqqih1$u%!m\EwK
x4lм\|.Aw6.!֎g@d\EGNզ)GõBos9)U1Y~}$2Чh[/K@h+̒i.M>!d2VÐɈ'h "a(0 xIbfw~ j&_VP<6ՋfZU!%
}G&Շn'ks/ .*/+NF@%N8W"?βÜ ߊZɰ4ÜC4 ~]m{|uسZqp9GHcI[_
H
|)MT&(G~|.Zm\ЏQ$ ;0PGP:[GGEQm DX!4ekx/Y%~P$(qG p%t2Ӹ<1#z/<XG{e0A{(6.eDK4_#ǂ!3(η`$NyV11P
^bןǽUV
&l$erR Q@u`r!hU,^2F9ݍi"yTcK }$*ZTX#ӦW: cP6I;pA:Ԗb4=>dt>G
(VB6]ЮoRUWj)[+wd[ 5yA/ X$?+"}Bm]1;y-,l՝,Pʖh]kr+Z?^L^j DO3k/-OO`/F`<~ _76
7xw'fVBBH<vӫ8{0gt6~l)-`Upǖ #n+6 Se!&*t0y_v=dey3Lf&`ެX4Egg\"#LޗvK\~)CRI_yF{RRq X P]іhGq{Y&ϫ댙lx&X2BP/hQiF77%@mٖ~rp5ˋ.8I|\l LJ_Q
cK#N{H
s,. "݀{6;jAN0͆X0 ~f6#N쬱D%IWզ-۲|#COc !=nZsC\ǒJ71;1{H^isT)4{cVt䣀\chfںϠrWraQA(@$3f3[е)F]Hn*y1 5ژ
-sĭQnA0$1ٟ X6-9yiPCG-4j˶iV~Gjhjѕ10