The main focus of SEMICON China is the further development of the China semiconductor and related emerging industries. High level executives from the industry, science and government will present their view and showcase their latest products and technology in the premier stage.
Join us on the world's premier Lithography Digital Forum.
We have two papers with presentations.
HIgh Performance Filtration for Bulk Materials: A novel HDPE membrane filter designed for EUV Lithography.
Novel Functional Membrane Approaches to Metal Contamination Control in Advanced Lithography