Purification & Filtration for IPA
Significant Improvement in Particle Reduction and Metal Removal Efficiency across All Metals
IonKleenTM IPA Purifier
- Proprietary post manufacturing cleaning provides lowest nonvolatile organics (NVR)
- Improved metal removal efficiency (MRE) across all metals
- Greater ion exchange capacity (IEC)
- Faster particle rinse-in in IPA
- Improved particle retention lowers defects on wafer
- Suitable for both room and high temperature IPA
- Lower dP with high area design
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New IonKleen IPA Purifier For IPA and Other Solvents
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