Gaskleen® II Gas Purifier

A unique combination of Pall's leading edge AresKleen^™ purification material combined with Ultramet-L^® stainless steel filter media creating the industry's most advanced true point-of-use purifier.

The Gaskleen^® II Purifier assembly is designed to remove contamination from most process gases. Sub ppb level purification is achieved at designed flow rates of up to 3 slpm while providing 0.003 μm filtration.

• Controls and reduces impurities such as O₂, H₂O, CO₂, CO, NMHC, Ni(CO)₄ and Fe(CO)₅
• One-for- one dimensional replacement of conventional in-line particle filter assemblies
• Assembly hardware is made of 316 L stainless steel
• High efficiency diffusion barrier ensures integrity of reactive material during installation
• Superior pressure drop characteristics
• Wide variety of gases purified
• 100% helium leak and pressure tested
• Compact size
• Not orientation sensitive¹
• Does not generate hazardous waste when used in non-hazardous gas service
• Will not release hydrocarbons
• No detectable metal contribution above background in HCl gas with HCLP material
• No detectable metal contribution above background in HBr gas with HBRP material

¹ Vertical installation recommended for NH3P.

Products in this datasheet may be covered by one or more patents, including US 7,465,692

Materials

• Electropolished 316 L stainless steel components
• ≤ 10 μin / 0.25 μm R_a internal surface finish

Particle Removal Efficiency Rating

• 1x10⁹ retention of particles ≥ 0.003 μm up to 5 slpm

Connections

• ¹⁄₄ in. Gasket Seal, Male/Male (VCR² compatible)

Operating Conditions

• Maximum Operating Pressure: 1000 psig / 69 bar
• Maximum operating temperature: 100 °C / 212 °F (INP, SIP, FCP, SF6P), 40 ˚C / 104 ˚F (NH3P, GEH4P, OXP, CLXP, HCLP, HBRP, CDAP)
• EU Pressure Equipment Directive: Assemblies have been evaluated and are CE marked per the European Union's Pressure Equipment Directive 97/23/EC

Design Flow Rate

• 0- 3 slpm @ 15 psig / 1 bar
• Higher intermittent flow rates of up to 5 slpm can be accommodated with reduced lifetime³

Packaging

• Double bagged
• Outer bag: aluminized mylar⁴
• Inner bag: polyethylene
• End fittings capped with metal seals
• Product packaged in an argon environment

Dimensions

• Length: 3.31 in. / 84 mm
• Diameter: 1.36 in. / 34.5 mm

² VCR is a trademark of Swagelok Co.
³ Contact the Pall Microelectronics Group for further information.
⁴ Mylar is a registered trademark of Dupont Teijin Films.

Technical Information

Impurity Removal as Tested in Specific Gases

Specific Gas	Impurity Removal Efficiency
Inert Gases: Nitrogen, Argon, Helium, Xenon, Krypton, Neon	< 1 ppb H2O, CO2, O2, and CO as tested in argon and nitrogen using APIMS analyzer
Flammable Gases: Silane, Hydrogen, Methane, Ethane, Cyclopropane, Propane, Dimethyl Ether	< 1 ppb H2O, CO2, O2, and CO as tested in argon, nitrogen and hydrogen using APIMS analyzer < 1 ppb H2O as tested in carbon monoxide using trace moisture analyzer H2O and siloxanes removed to trace levels as tested in silane using APIMS
Carbon Monoxide	< 1 ppb Ni(CO)4, and < 1 ppb Fe(CO)5 as tested in carbon monoxide using GC-ECD analyzer
Ammonia	< 1 ppb H2O, CO2, and O2 as tested in argon using APIMS < 12 ppb H2O as tested in ammonia using NIR-TDLAS Removal of O2 and CO2 to trace levels as tested in ammonia using GC-DID
Fluoromethane, Difluoromethane, Trifluoromethane, Tetrafluoroethane, Pentafluoroethane, Heptafluoropropane, Carbon Tetrafluoride, Perfluoropropane, Perfluorocyclobutane, Hexafluoroethane	< 1 ppb H2O, CO2, O2, and CO as tested in argon and nitrogen using APIMS analyzer < 1 ppb O2 as tested in trifluoromethane using trace oxygen analyzer < 10 ppb H2O as tested in trifluoromethane using trace moisture analyzer and FTIR
Germane	< 1 ppb H2O, CO2, O2, and CO as tested in argon and nitrogen using APIMS analyzer
Sulfur Hexafluoride	< 1 ppb H2O, CO2, and O2 as tested in argon using APIMS
Oxygenated Gases: Carbon Dioxide, Oxygen, Nitrous Oxide, Clean Dry Air	< 10 ppb H2O < 1 ppb H2O, and CO2, as tested in argon using APIMS analyzer
Chlorinated Gases: Boron Trichloride, Chlorine, Trichlorosilane, Dichlorosilane	< 100 ppb H2O < 1 ppb H2O, and CO2, as tested in argon using APIMS analyzer
Hydrogen chloride	< 15 ppb H2O as tested in hydrogen chloride using CRDS < 1 ppb H2O as tested in argon using APIMS analyzer
Hydrogen Bromide	< 50 ppb H2O as tested in hydrogen bromide using CRDS < 1 ppb H2O as tested in argon using APIMS analyzer
Photolithography clean dry air	< 1 ppb H2O as tested in argon using APIMS analyzer < 300 ppt C4H8 as tested in argon using APIMS Analyzer < 10 ppt SO2 as tested in nitrogen using ion chromatograph < 15 ppt NH3 as tested in nitrogen using ion chromatograph < 1 ppt HMDSO as tested in argon using APIMS analyzer and baseline subtraction

Unit conversion: 1 bar = 100 kilopascals

Pressure Drop vs. Gas Flow Rate

Lifetime Calculations

Pall AresKleen Purification Material: Inert Gas Service
Gaskleen II Purifier Assembly, Part # GLP2INPVMM4

Inlet Pressure: 30 psig (2.1 bar) Contaminant Challenge as H₂O


Pall AresKleen Purification Material: Inert Gas Service Gaskleen II Purifier Assembly, Part # GLP2INPVMM4

Inlet Pressure: 30 psig (2.1 bar) Contaminant Challenge as O₂

Dimensions

Part Number	Specific Gas	Effluent Purity Specifications
GLP2INPVMM4	Inert Gases: Nitrogen, Argon, Helium, Xenon, Krypton, Neon	< 1 ppb H2O, O2, CO2, CO
GLP2SIPVMM4	Flammable Gases: Silane, Hydrogen, Methane, Ethane, Cyclopropane, Propane, Dimethyl Ether	< 1 ppb H2O, CO2, O2, CO
	Carbon Monoxide	< 1 ppb H2O, O2, CO2, Ni(CO)4, Fe(CO)5
GLP2NH3PVMM4	Ammonia	< 1 ppb H2O, CO2, O2, CO
GLP2FCPVMM4	Fluoromethane, Difluoromethane, Trifluoromethane, Tetrafluoroethane, Pentafluoroethane, Heptafluoropropane, Carbon Tetrafluoride, Perfluoropropane, Perfluorocyclobutane, Hexafluoroethane	< 1 ppb H2O, CO2, O2
GLP2GEH4PVMM4	Germane	< 1 ppb H2O, CO2, O2, CO
GLP2SF6PVMM4	Sulfur Hexafluoride	< 1 ppb H2O, CO2, O2, CO
GLP2OXPVMM4	Oxygenated Gases: Carbon Dioxide, Oxygen, Nitrous Oxide	< 10 ppb H2O
GLP2CLXPVMM4	Chlorinated Gases: Boron Trichloride, Chlorine, Trichlorosilane, Dichlorosilane	< 100 ppb H2O
GLP2HCLPVMM4	Hydrogen Chloride	< 15 ppb H2O
GLP2HBRPVMM4	Hydrogen Bromide	< 50 ppb H2O
GLP2CDAPVMM4	Photolithography clean dry air	< 1 ppb H2O, < 300 ppt organics (as C4), < 10 ppt acid gases (as SO2), < 15 ppt basic gases (as NH3), < 1 ppt refractory compounds (as HMDSO)

Unit conversion: 1 bar = 100 kilopascals