P Emflon® Filter (Microlithography)

The P Emflon filter is specifically recommended for bulk filtration of photoresists and chemicals that are compatible with PTFE and high density polyethylene (HDPE). In addition, it utilizes the latest advance in Pall filtration technology: the crescent shaped Ultipleat^® filter configuration.

• Wide range of configurations
• High flow rates
• Integrity testable
• Low extractables
• Optimized design
• Manufactured in a cleanroom environment
• 100% integrity tested

Materials

• Medium: PTFE
• Core, cage, and end caps: High density polyethylene (HDPE)
• Support and drainage: High density polyethylene (HDPE)
• O-ring options: Viton¹ and FEP encapsulated elastomer

Removal Ratings

• 10 μm, 5 μm, 0.2 μm, 0.1 μm, 0.05 μm

Filter Areas

• 254 mm / 10 in.: 1.07 m² / 11.5 ft²

Configurations

• Nominal length:
  • 229 mm / 9 in.
  • 254 mm / 10 in.
  • 508 mm / 20 in.
  • 762 mm / 30 in.
  • 1016 mm / 40 in.
• Diameter: 70 mm / 2.75 in.
• O-ring size / end caps:
  • Code 3: 222 double O-ring / flat end
  • Code 8: 222 double O-ring / finned end
  • Code 7: 226 double O-ring / bayonet lock / finned end
  • MR Code 3: 222 double O-ring / flat end designed to retrofit Code 0 elements

Operating Conditions

• Maximum temperature: 70 °C / 158 °F
• Maximum forward/reverse differential pressure: 0.41 MPa @ 70 °C / 60 psid @ 158 °F

Integrity Test Values²

Per 254 mm / 10 in. segment

• 0.05μm: < 50 mL / min @ 0.12 MPa / 17.5 psig
• 0.1 μm: < 20 mL / min @ 0.1 MPa / 15 psig

¹ Viton is a trademark of E.I. du Pont de Nemours and Company.
² Test fluid used is 60:40, IPA:H2O.

Pressure Drop vs. Liquid Flow Rate³

³ For liquids with a viscosity differing from water, multiply the pressure drop by the viscosity in centipoise.

Part Number4	Removal Rating (μm)	Nominal Length (mm / in.)	Configuration Code	O-Ring Material5
ABD1UFE3EJ	10	254 / 10	3	Ethylene propylene
ABD1UFC3EJ	5.0	254 / 10	3	Ethylene propylene
ABD1UFR3EH1	0.2	254 / 10	3	Fluoropolymer encapsulated elastomer
MRD1UFR3EH1	0.2	229 / 9	3	Fluoropolymer encapsulated elastomer
MRD1UFT3EH1	0.1	229 / 9	3	Fluoropolymer encapsulated elastomer
ABD1UFT3EH1	0.1	254 / 10	3	Fluoropolymer encapsulated elastomer
ABD1UFT7EH1	0.1	254 / 10	7	Fluoropolymer encapsulated elastomer
ABD1UFT8EH1	0.1	254 / 10	8	Fluoropolymer encapsulated elastomer
ABD1UFD3EH1	0.05	254 / 10	3	Fluoropolymer encapsulated elastomer
ABD1UFD7EH1	0.05	254 / 10	7	Fluoropolymer encapsulated elastomer
ABD1UFD8EH1	0.05	254 / 10	8	Fluoropolymer encapsulated elastomer
MRD1UFD3EH1	0.05	229 / 9	3	Teflon encapsulated Viton

⁴ The above filter configurations are also available in 508 mm / 20 in., 762 mm / 30 in., and 1016 mm / 40 in. lengths. These can be ordered by changing the fourth digit in the part number to a 2, 3 or 4 respectively.
⁵ Other O-ring materials are available.