SGH Filter Housing

The SGH filter housings are designed for ultra-high purity bulk gas applications in the semiconductor industry.

• Clean "sweep tube" design
• Easy cartridge changeout
• Available in three bowl lengths
• Available in 3 or 12 around configurations
• Through bolt closure
• Code 7 (-226 double o-ring with locking tab and finned end) cartridge adaptor

Materials

Medium	All-316L stainless steel
Internal surface treatment	Electropolished
Surface finish options	≤ 0.25 μm (10 μin) Ra or ≤ 0.63 μm (25 μin) Ra
O-ring seal	Fluorocarbon

Connections

3 around	2 inch (0.065 inch wall) or 3 inch (0.065 inch wall) buttweld tube Purge connections: 1⁄2 inch gasket seal, male (VCR1 or compatible) Vent: 1⁄2 inch gasket seal, male (VCR1 or compatible)
12 around	3 inch (0.065 inch wall) or 4 inch (0.083 inch wall) buttweld tube Purge connections: 1⁄2 inch gasket seal, male (VCR1 or compatible) Vent: 1⁄2 inch gasket seal, male (VCR1 or compatible) Drain: 1⁄2 inch gasket seal, male (VCR1 or compatible)

Operating Conditions

Maximum allowable working pressure	3 around: 1.72 MPa at 93 ˚C / 250 psig @ 200 ˚F 12 around: 1.24 MPa at 38 ˚C / 180 psig @ 100 ˚F 1.17 MPa at 93 ˚C / 170 psig @ 200 ˚F

Certifications

EU Pressure Equipment Directive	Housings have been evaluated for compliance with the European Union's Pressure Equipment Directive 97/23/EC and are CE marked
ASME	Housings are designed, manufactured and stamped in accordance with the ASME BPVC Section VIII, Div. 1, including latest addendum

Leak Rating

• 100% Helium leak tested to 10^-8 atm-cm³/s

Dimensions

	Number of cartridges	Filter length	Nominal length (L1) (mm / in.)	Nominal diameter (D) (mm / in.)	Face-to-face Dimensions (L2) (mm / in.)
SG[ ]H32	3	508 / 20	1,295 / 51	219 / 8.63	508 / 20
SG[ ]H33	3	762 / 30	1,549 / 61	219 / 8.63	508 / 20
SG[ ]H34	3	1,016 / 40	1,803 / 71	219 / 8.63	508 / 20
SG[ ]H122	12	508 / 20	1,549 / 61	356 / 14	768 / 30.25
SG[ ]H123	12	762 / 30	1,803 / 71	356 / 14	768 / 30.25
SG[ ]H124	12	1,016 / 40	2,057 / 81	356 / 14	768 / 30.25

Please contact Pall Microelectronics for detailed dimensions on specific housing part numbers.

SG [1] H [2] [3] G7BW [4] - [5]

Table 1

Code	Internal surface finish
Blank	≤ 0.63 μm / 25 μin Ra
L	≤ 0.25 μm / 10 μin Ra

Table 2

Code	Number of cartridges per housing
3	3 around
12	12 around

Table 3

Code	Nominal cartridge length (mm / in.)
2	508 / 20
3	762 / 30
4	1,016 / 40

Table 4

Code	Inlet / outlet connections
32	2 inch tube x 0.065 wall
48	3 inch tube x 0.065 wall
64	4 inch tube x 0.083 wall

Table 5

Code	Pressure vessel code
Blank	ASME code, U-Stamp
CE	CE marked