Instrumentation

  • Easy Installation
Process monitoring has become more critical than ever. With the advance of each new technology node, the detection and purification of “killer” contaminants has become more challenging as those contaminants become smaller in size and lower in volume.

Pall offers low detection limits and fast dry down times in a cost effective platform built for mobility with the Gaskleen® Pico1000 Analyzer. The instrument assists semiconductor fabricators, gas handling equipment manufactures, process gas suppliers and OEM inspection tool companies using ultra-high purity (UHP) nitrogen produce their products and control quality.

Applications

Fabs

  • Gas line spot checks and troubleshooting
  • Purifier application and end-of-life detection
  • Continuous Quality Control Center (CQC) process gas line monitoring
  • Equipment maintenance recovery

Gas Delivery System Manufactures / Integrators

  • Certify gas cabinets, gas sticks and valve manifold box to customer’s specification before delivery or after installation
  • Moisture validation and dry down curves of new component designs to provide product specifications
  • Field service engineers certify GDS component after installation

OEM Component Manufactures

  • Production qualification and dry down curves of GDS components for customer specifications
  • Moisture validation and dry down curves of new component designs to provide product specifications
  • Field service engineers certify GDS component after installation

UHP Gas Manufacturing

  • Certify gas products are meeting production control points
  • Pre-purifier supervision for CQC of gas production and end-of-life determination
  • Grab sampling of gas delivery systems and qualification after installation or maintenance

OEM Tool Manufactures

  • Field service engineers validation of gas specifications before tool installation at customer site
  • Production pre-purifier preparation and verification prior to installing the component into the tool
  • Prevent installation issues, warrantee risk and premature purifier failure in the field
  • Trouble shoot field issues related to moisture excursions
  • Improve up time, reduce costs and increase yield by accelerating PM “Green Light to Green Light”
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Contact Us
Contact Pall Microelectronics with your questions.
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