Pall Enables Key Chipmaking Processes and Nanotechnology Applications
Pall’s carbon monoxide purification technology is based on the company’s AresKleen™ inorganic purification media, which was first introduced in 2002 to meet the semiconductor industry’s increasingly stringent gas purification needs.
“As device sizes shrink and new processes emerge, Pall continues to expand the capabilities of its gas purification portfolio,” said Steve Chisolm, president of Pall Microelectronics. “This latest development applies the advanced purification technology found in our AresKleen product to the challenge of purifying carbon monoxide.”
Carbon monoxide is widely used in semiconductor fabrication during plasma etch processes, which represent a multi-billion dollar market. It is also used in emerging nanotechnology applications, specifically in the synthesis of single- and multi- wall carbon nanotubes.
Designed for use with Pall’s Gaskleen® point-of-use purifiers, the AresKleen material offers sub-part per billion purification of a variety of gases, in addition to carbon monoxide. The AresKleen inorganic media captures and removes impurities such as oxygen, moisture, carbon dioxide, and metal carbonyls, contaminants that are known to be detrimental to semiconductor and nanotechnology processes.
Pall Microelectronics is the global leader in filtration, separations and purification technologies for the microelectronics industry. It supports the semiconductor, data storage, fiber optic, advance display and materials markets with a comprehensive suite of contamination control solutions for chemical, gas, water, chemical mechanical polishing (CMP) and photolithography processes.
About Pall Corporation
Pall Corporation (NYSE: PLL) is the global leader in the rapidly growing field of filtration, separations and purification. Pall's business is organized around two broad markets: Life Sciences and Industrial. The Company provides leading-edge products to meet the demanding needs of customers in biotechnology, pharmaceuticals, transfusion medicine, semiconductors, municipal drinking water, aerospace and broad industrial markets. Total revenues are $1.6 billion. The Company is headquartered in East Hills, New York, and has operations in more than 30 countries. Further information is available at http://www.pall.com/.