Gaskleen® TM Filter Assemblies 1 1/8'' W-Seal

Pall's Gaskleen Top Mount (TM) filter assemblies are designed for ≥ 3 nanometer filtration of semiconductor process gases. The top mount filter is well-suited for integrated gas delivery systems, providing easy access and change out.

Gaskleen TM 1013 Series Assembly

• Electropolished 316L stainless steel housing
• State-of-the-art 316L stainless steel or nickel filter medium
• High temperature and pressure capabilities
• Excellent gas displacement and desorption characteristics
• 100% helium leak tested
• Manufactured and packaged in a cleanroom environment

Gaskleen TM 3700 Series Assembly

• Electropolished 316L stainless steel housing
• State-of-the-art 316L stainless steel filter medium
• High temperature and pressure capabilities
• Excellent gas displacement and desorption characteristics
• 100% helium leak tested
• Manufactured and packaged in a cleanroom environment

Materials

• Electropolished 316L stainless steel housing
• Cr:Fe (1:1) chromium-enriched internal surface chemistry
• ≤ 5 μin / 0.13 μm R_a internal surface finish

Removal Rating

• ≥ 3 nm

Particle Removal Characteristics

• 1013 Series: 10⁹ reduction at rated flow of 5 slpm for stainless steel and 3 slpm for nickel
• 3700 Series: 10⁹ reduction at rated flow

Connections

• W-seal, 1¹⁄₈ in. Interface

Leak Rating

• 100% helium leak tested to 10^-9 atm•cm³/s
• Design validated to 10^-11 atm•cm³/s

Operating Conditions

• Maximum operating pressure: 3.4 MPa @ 100 °C / 500 psig @ 212 °F
• Maximum allowable differential pressure: 0.69 MPa @ 40 °C / 100 psid @ 104 °F

Pressure Drop vs. Gas Flow Rate

F1013

F3700

Dimensions

F1013