Gaskleen® V Series Filter Assembly

The Gaskleen V filter assembly is Pall’s latest generation gas filter assembly, designed to provide filtration of ultrahigh-purity semiconductor process gases. Our patented o-ringless design eliminates the need for an elastomeric seal. As a result, there are no downstream (wetted surface) welds.

The preconditioned option provides the cleanest PTFE filter assemblies available.

• 316L stainless steel housing
• All-fluoropolymer filter element
• High temperature and pressure resistance
• 100% helium leak tested
• Manufactured and packaged in a cleanroom environment.

Products in this datasheet may be covered by one or more patents, including US 5,510,026.

Materials

• Medium: PTFE
• Support: fluoropolymer
• Core and end caps: PFA
• O-ring: None
• Electropolished 316L stainless steel housing
• VAR PLUS housing meets or exceeds typical VIM / VAR specification
• Internal Surface Finish
  
  • ≤ 0.18 μm / 7 μin R_a (gasket-seal fittings)
  • ≤ 0.51 μm / 20 μin R_a (compression fittings)
• Cr:Fe (≥ 1.2:1) chromium enriched internal surface chemistry

Removal Rating¹

• ≥ 3 nm

Preconditioned Cleanliness Option

• < 10 ppb moisture contribution
• < 10 ppb total hydrocarbon (THC) contribution
• < 10 ppb oxygen (O₂) contribution

Connections

• ¹⁄₄ in., ¹⁄₂ in. or ³⁄₄ in. Gasket seal (VCR² or compatible)
• ¹⁄₄ in., ³⁄₈ in. or ¹⁄₂ in. compression fittings

Operating Conditions

• Maximum operating pressure: 5.2 MPa at 140 ˚C / 750 psig at 284 ˚F
• Maximum allowable forward differential pressure: 0.7 MPa at 20 ˚C / 100 psid at 68 ˚F
• Maximum allowable reverse differential pressure: 0.3 MPa at 20 ˚C / 50 psid at 68 ˚F
• EU Pressure Equipment Directive: Assemblies have been evaluated for compliance with the European Union's Pressure Equipment Directive 97/23/EC and are CE marked

Leak Rating

• 100% helium leak tested to 10^-9 atm•cm³/s
• Design validated to 10^-11 atm•cm³/s

¹ Particle rating is based on laboratory testing with NaCl aerosol.
² VCR is a trademark of Swagelok Company.

Pressure Drop vs. Gas Flow Rate

Dimensions

Part Number	Description	Nominal Length (L) (mm / inch)	Preconditioned
SGLFPF6501VMM4	1⁄4 in. Gasket seal, (VCR or compatible) male / male	127 / 5.0	No
SGLFPF6502VMM4	1⁄4 in. Gasket seal, (VCR or compatible) male / male	127 / 5.0	Yes
SGLFPF6501VMM8	1⁄2 in. Gasket seal, (VCR or compatible) male / male	127 / 5.0	No
SGLFPF6502VMM8	1⁄2 in. Gasket seal, (VCR or compatible) male / male	127 / 5.0	Yes
SGLFPF6501VMM12	3⁄4 in. Gasket seal, (VCR or compatible) male / male	140 / 5.5	No
GLFPF6501VMF4	1⁄4 in. Gasket seal, (VCR or compatible) male / female	141 / 5.6	No
SGLFPF6501SM4	1⁄4 in. Compression seal, (Swagelok or compatible) male / male	113 / 4.4	No
GLFPF6501SM4	1⁄4 in. Compression seal, (Swagelok or compatible) male / male	141 / 5.6	No
SGLFPF6501SM6	3⁄8 in. Compression seal, (Swagelok or ccompatible) male / male	118 / 4.6	No
GLFPF6501SM6	3⁄8 in. Compression seal, (Swagelok or compatible) male / male	148 / 5.8	No
SGLFPF6501SM8	1⁄2 in. Compression seal, (Swagelok or compatible) male / male	119 / 4.7	No

Unit conversion: 100 kilopascals = 1 bar