FlexBowl™ Filter Pressure Vessel System

The FlexBowl single-cartridge filter pressure vessel system has been specifically designed for the challenging ultrapure chemical applications used in semiconductor manufacture. It meets Pall’s same high standards for cleanliness, purity, compatibility, and mechanical strength as its Megaplast™ housings and Kleen-Change® assemblies. The system’s extremely flexible design allows for easier and safer filter handling, and reduces cost of ownership.

The key to the flexibility of the FlexBowl system design is a universal manifold, which can accommodate a fully disposable capsule assembly or a reusable housing. Either of these connects easily to the manifold with a quarter turn of the locking ring.

Pall offers the FlexBowl pressure vessel system with many housing and capsule assembly options to maximize flexibility. Housings are available in 4 in (102 mm), 10 in (254 mm), and 20 in (508 mm) sizes. The 10 in (254 mm) housing is designed to fit standard 10 in (254 mm) filter cartridges with a diameter of up to 3.25 in (82.5 mm) and a nominal length of 10 in (254 mm). Standard semiconductor industry inlet and outlet connection fittings for this system are also offered in a variety of different sizes and styles.

Watch a video to learn more

Materials

Reusable housing

• Manifold and bowl: High-purity PFA
• O-ring: Fluoropolymer-encapsulated fluoroelastomer
• Locking ring: PVDF

Disposable assembly

• Manifold: High-purity PFA
• Capsule assembly: High-purity PFA (G2 and G3) or HDPE (AB style)

Manifold

• Locking ring: Polyetherimide (PEI)

Connections

• Inlet/outlet: ³⁄₄ in. and 1 in. Pillar,^{2 3}⁄₄ in. and 1 in. flare style, or 1 in. butt weld pipe
• Vent and drain: ¹⁄₂ in. Pillar, ¹⁄₂ in. flare style, or ¹⁄₂ in. butt weld

Operating Conditions

Maximum operating temperature:
FlexBowl PFA G2 housing

95 °C (203 °F)

FlexBowl PFA G2 and G3 disposable assemblies

• 100 °C (212 °F)

FlexBowl HDPE disposable assemblies

• 50 °C (122 °F)

Maximum operating pressure: FlexBowl PFA G2 housing

• 0.56 MPa (80 psid) @ 30 °C (86 °F)
• 0.28 MPa (40 psid) @ 95 °C (200 °F)

FlexBowl PFA G2 and G3 disposable assemblies

• 0.5 MPa (73 psid) @ 25 °C (77 °F)
• 0.3 MPa (44 psid) @ 100 °C (212 °F)

FlexBowl HDPE disposable assembly

• 0.4 MPa (58 psid) @ 25 °C (77 °F)
• 0.15 MPa (21 psid) @ 50 °C (122 °F)

²Pillar is a trademark of Nippon Pillar Packaging Co., Ltd.

FlexBowl Capsule Assembly

Pressure Drop vs. Liquid Flow Rate³
0.75 in. nozzle

³ For liquids with viscosity differing from water, multiply the pressure drop by the viscosity in centipoise.

Installation and Operating Instructions for Flexbowl™ Filter Pressure Vessel System

Dimensions

G2 style housing		G2 style capsule

G3 style capsule		HDPE style capsule

Universal Manifold

Manifold Inlet/Outlet Connections

Style	Width (mm / in.)
1 in. butt weld	196.85 / 7.75
3⁄4 in. flare style	190.50 / 7.50
1 in. flare style	214.63 / 8.45
3⁄4 in. pillar	217.67 / 8.57
1 in. pillar	255.50 / 8.76

The FlexBowl Filter Pressure Vessel System

The universal manifold can accept either a housing or a capsule.

Reusable Housing Option

• Filter cartridge can be securely sealed in the bowl before approaching the tool.
• Housing accepts standard length cartridges without the need for special adapters that add cost and may impede fluid flow and cleaning.
• Assembled housing and cartridge unit is inserted into the manifold and securely sealed with a quarter turn of the manifold locking ring using a spanner wrench.¹ It can be disengaged from the manifold quickly with a quarter turn of the locking ring.
• Cartridge and bowl are removed as a unit, requiring minimal space in the tool.
• Cartridge, still sealed within the housing, can be safely transported to an appropriate area for changeout, with minimal exposure to chemicals at the tool.

Disposable Assembly Option

• Convenient, eco-friendly, and economical (low cost of ownership).
• Safer and more reliable than conventional housings.
• Capsule is offered in high-purity PFA G2 and in high density polyethylene (HDPE), AB style.
• Capsule is inserted into the manifold and securely sealed with a quarter turn of the manifold locking ring. It can be disengaged from the manifold quickly with a quarter turn of the locking ring.
• Manifold head with inlet, outlet, and drain fittings remains installed in the tool.

¹ Part number ACS0655AA

Part Number	Description	Connections Inlet, Outlet / Vent, Drain	Nominal Length (L) (mm/in.)
Complete Housing System
FBMH04T17E71H1	4 in. complete housing system	1 in. Pillar / 1⁄2 in. Pillar	396.14 / 15.60
FBMH04T13E71H1	4 in. complete housing system	3⁄4 in. Pillar / 1⁄2 in. Pillar	396.14 / 15.60
FBMH04T17E51H1	4 in. complete housing system	1 in. flare style / 1⁄2 in. flare style	351.04 / 13.82
FBMH04T13E51H1	4 in. complete housing system	3⁄4 in. flare style / 1⁄2 in. flare style	351.04 / 13.82
FBMH04T16EBWH1	4 in. complete housing system	1 in. butt weld / 1⁄2 in. butt weld	335.69 / 13.22
FBMH04T174E51H14	4 in. complete housing system	1 in. flare style / 1⁄4 in. flare style	346.96 / 13.66
FBMH04T134E51H14	4 in. complete housing system	3⁄4 in. flare style / 1⁄4 in. flare style	346.96 / 13.66
FBMH1T17E71H1	10 in. complete housing system	1 in. Pillar / 1⁄2 in. Pillar	528.64 / 20.81
FBMH1T13E71H1	10 in. complete housing system	3⁄4 in. Pillar / 1⁄2 in. Pillar	528.64 / 20.81
FBMH1T17E51H1	10 in. complete housing system	1 in. flare style / 1⁄2 in. flare style	483.54 / 19.04
FBMH1T13E51H1	10 in. complete housing system	3⁄4 in. flare style / 1⁄2 in. flare style	483.54 / 19.04
FBMH1T16EBWH1	10 in. complete housing system	1 in. butt weld / 1⁄2 in. butt weld	468.19 / 18.43
FBMH1T174E51H14	10 in. complete housing system	1 in. flare style / 1⁄4 in. flare style	479.54 / 18.88
FBMH1T134E51H14	10 in. complete housing system	3⁄4 in. flare style / 1⁄4 in. flare style	479.54 / 18.88
FBMH2T17E71H1	20 in. complete housing system	1 in. Pillar / 1⁄2 in. Pillar	784.14 / 30.87
FBMH2T13E71H1	20 in. complete housing system	3⁄4 in. Pillar / 1⁄2 in. Pillar	784.14 / 30.87
FBMH2T17E51H1	20 in. complete housing system	1 in. flare style / 1⁄2 in. flare style	744.54 / 29.31
FBMH2T13E51H1	20 in. complete housing system	3⁄4 in. flare style / 1⁄2 in. flare style	744.54 / 29.31
FBMH2T16EBWH1	20 in. complete housing system	1 in. butt weld / 1⁄2 in. butt weld	723.69 / 28.49
Manifold Only
FBMT17E71	Manifold only	1 in. Pillar / 1⁄2 in. Pillar	144.01 / 5.67
FBMT13E71	Manifold only	3⁄4 in. Pillar / 1⁄2 in. Pillar	144.01 / 5.67
FBM17E51	Manifold only	1 in. flare style / 1⁄2 in. flare style	136.14 / 5.36
FBM13E51	Manifold only	3⁄4 in. flare style / 1⁄2 in. flare style	136.14 / 5.36
FBM16EBW	Manifold only	1 in. butt weld / 1⁄2 in. butt weld	129.79 / 5.11

⁴ The manifold vent and drain connections are ¹⁄₂ in. flare style. The housing bowl vent is ¹⁄₄ in. flare style.

Part Number 5	Description	Connections Inlet, Outlet / Vent, Drain	Nominal Length (L) (mm/in.)
Complete G2 Assembly System6
n/a	10 in. complete G2 assembly system	1 in. Pillar / 1⁄2 in. Pillar	517 / 20.35
n/a	10 in. complete G2 assembly system	3⁄4 in. Pillar / 1⁄2 in. Pillar	517 / 20.35
n/a	10 in. complete G2 assembly system	1 in. flare style / 1⁄2 in. flare style	511 / 20.12
n/a	10 in. complete G2 assembly system	3⁄4 in. flare style / 1⁄2 in. flare style	511 / 20.12
n/a	10 in. complete G2 assembly system	1 in. butt weld / 1⁄2 in. butt weld	TBD
Complete G3 Assembly System6
n/a	10 in. complete G3 assembly system	1 in. Pillar / 1⁄2 in. Pillar	547 / 21.53
n/a	10 in. complete G3 assembly system	3⁄4 in. Pillar / 1⁄2 in. Pillar	547 / 21.53
Complete PE Assembly System6
n/a	10 in. complete PE assembly system	3⁄4 in. flare style / 1⁄4 in. flare style	466 / 18.36
G2 Capsule
LDFBGT1GPKLE51K3	10 in. G2 capsule	n/a / 1⁄2 in. flare style	374.86 / 14.76
LDFBGT1GPKLE71K3	10 in. G2 capsule	n/a / 1⁄2 in. Pillar	TBD
LDFBGT1GPQLE51K3	10 in. G2 capsule	n/a / 1⁄2 in. flare style	374.86 / 14.76
LDFBGT1GPQLE71K3	10 in. G2 capsule	n/a / 1⁄2 in. Pillar	TBD
LDFBGT1GPDLE51K3	10 in. G2 capsule	n/a / 1⁄2 in. flare style	374.86 / 14.76
LDFBGT1GPDLE71K3	10 in. G2 capsule	n/a / 1⁄2 in. Pillar	TBD
LDFBGT1UCFDLE51K3	10 in. G2 capsule	n/a / 1⁄2 in. flare style	374.86 / 14.76
LDFBGT1UCFDLE71K3	10 in. G2 capsule	n/a / 1⁄2 in. Pillar	TBD
LDFBGT1UCFTLE51K3	10 in. G2 capsule	n/a / 1⁄2 in. flare style	374.86 / 14.76
LDFBGT1UCFTLE71K3	10 in. G2 capsule	n/a / 1⁄2 in. Pillar	TBD
LDFBGT1UCFRLE51K3	10 in. G2 capsule	n/a / 1⁄2 in. flare style	374.86 / 14.76
LDFBGT1UCFRLE71K3	10 in. G2 capsule	n/a / 1⁄2 in. Pillar	TBD
LDFBGT1STQDE51K3	10 in. G2 capsule	n/a / 1⁄2 in. flare style	374.86 / 14.76
LDFBGT1STQDE71K3	10 in. G2 capsule	n/a / 1⁄2 in. Pillar	TBD
LDFBGT1XXXXEBWK3	10 in. G2 capsule	n/a / 1⁄2 in. butt weld	TBD
G3 Capsule7
LDFBHT1XXXXE71K3	10 in. G3 capsule	n/a / 1⁄2 in. Pillar	TBD
HDPE Capsule
LDDFBT1UHSQE518	10 in. PE capsule	n/a / 1⁄4 in. flare style	TBD
Housing Kit
FBHT04EBWH1	4 in. G2 bowl	n/a / 1⁄2 in. butt weld
FBHT044E51H1	4 in. G2 bowl	n/a / 1⁄4 in. flare style
FBHT04E51H1	4 in. G2 bowl	n/a / 1⁄2 in. flare style
FBHT04E71H1	4 in. G2 bowl	n/a / 1⁄2 in. Pillar
FBHT1EBWH1	10 in. G2 bowl	n/a / 1⁄2 in. butt weld
FBHT14E51H1	10 in. G2 bowl	n/a / 1⁄4 in. flare style
FBHT1E51H1	10 in. G2 bowl	n/a / 1⁄2 in. flare style
FBHT1E71H1	10 in. G2 bowl	n/a / 1⁄2 in. Pillar
FBHT2EBWH1	20 in. G2 bowl	n/a / 1⁄2 in. butt weld
FBHT2E51H1	20 in. G2 bowl	n/a / 1⁄2 in. flare style
FBHT2E71H1	20 in. G2 bowl	n/a / 1⁄2 in. Pillar

⁵ The part number suffix K3 indicates that the filter is prewet and packaged with DI water. Replace K3 with K7 for the low metal ion Me-KleenSM pretreatment option.
⁶ The manifold and the capsule must be ordered separately.
⁷ Contact your Pall representative for additional information about the G3 option.
⁸ Add K6 to the end of the part number for the low metal ion Me-Kleen pretreatment option.

Unit conversion: 1 MPa = 10 bar