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Profile® II Filters for CMP Applications
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Profile II filters effectively remove agglomerated particles and gels from oxide, tungsten and copper CMP slurries, while not affecting slurry particle distribution.
- Depth filter with consistent, reproducible performance
- Continuously profiled pore structure for built-in prefiltration and long service life
- Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles
Materials
- Medium: Polypropylene
- Core, cage and end caps: Polypropylene
- O-rings option: Ethylene propylene (EPR)
Removal Ratings
- 0.2 μm, 0.3 μm, 0.5 μm, 1 μm, 3 μm, 5 μm, 10 μm, 20 μm, 30 μm and 40 μm (Profile filter removal ratings can be 5–10 times finer than traditional ratings for depth filters.)
Configurations
- Nominal length: 254 mm / 10 in., 508 mm / 20 in., 762 mm / 30 in. and 1016 mm / 40 in.
- O-ring size / end caps:
Code 3 (222 double O-ring flat end)
Code 25 (222 double O-ring flat end)
Operating Conditions
- Maximum Temperature: 82 °C/180 °F
- Maximum Differential Pressure:
0.41 MPa @ 30 °C / 60 psig @ 85 °F;
0.34 MPa @ 50 °C / 50 psid @ 120 °F;
0.2 MPa @ 70 °C / 30 psid @ 160 °F;
0.1 MPa @ 82 °C / 15 psid @ 180 °F
Pressure Drop vs. Liquid Flow Rate1
1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.
| Part Number | Removal Rating2 (μm) | Nominal Length2 (mm / in.) | Configuration Code2 | O-Ring Material2 |
| AB1Y00225J | 0.2 | 254 / 10 | 25 | EPR |
| AB2Y00225J | 0.2 | 508 / 20 | 25 | EPR |
| AB1Y0033J | 0.3 | 254 / 10 | 3 | EPR |
| AB2Y0033J | 0.3 | 508 / 20 | 3 | EPR |
| AB1Y0053J | 0.5 | 254 / 10 | 3 | EPR |
| AB2Y0053J | 0.5 | 508 / 20 | 3 | EPR |
| AB1Y0103J | 1 | 254 / 10 | 3 | EPR |
| AB2Y0103J | 1 | 508 / 20 | 3 | EPR |
| AB1Y0303J | 3 | 254 / 10 | 3 | EPR |
| AB2Y0303J | 3 | 508 / 20 | 3 | EPR |
| AB1Y0503J | 5 | 254 / 10 | 3 | EPR |
| AB2Y0503J | 5 | 508 / 20 | 3 | EPR |
| AB1Y1003J | 10 | 254 / 10 | 3 | EPR |
| AB2Y1003J | 10 | 508 / 20 | 3 | EPR |
| AB1Y2003J | 20 | 254 / 10 | 3 | EPR |
| AB2Y2003J | 20 | 508 / 20 | 3 | EPR |
| AB1Y3003J | 30 | 254 / 10 | 3 | EPR |
| AB2Y3003J | 30 | 508 / 20 | 3 | EPR |
| AB1Y4003J | 40 | 254 / 10 | 3 | EPR |
| AB2Y4003J | 40 | 508 / 20 | 3 | EPR |