Thin Film Module Manufacturing
Chemical and Water FiltrationUltipleat® PK filtration products are designed for chemical and DI water processing on large substrates. Fine filtration is especially important for film integrity during thin film processing. Clean substrates are required for consistent high module quality.
Gas Solutions for Thin Film Solar Manufacturing
Pall offers a line of filtration and purification products that deliver the highest purity gases required by the makers of photovoltaic devices.
Gas Purification for Thin Film DepositionThe thin film active layers in copper indium gallium diselenide (CIGS) solar cells are frequently formed using sputter deposition.
During this vaccum-based process, a plasma of electrons and ions are created from the inert argon gas. These ions dislodge atoms from the surface of a crystalline material which is then deposited to form an extremely thin coating on a substrate.
Multicomponent films can be deposited with excellent stiochiometric accuracy.
Pall argon purification products remove moisture, oxygen, carbon monoxide, carbon dioxide and hydrocarbons thereby:
Amorphous Silicon Thin Film and Anti-Reflective CoatingsMolecular contamination in the hydrogen and silane gases used to form the antireflective coatings or amorphous silicon films can lead to a number of process problems, such as non-uniform coatings and other types of defects arising from particle generation.
Gaskleen® II Purifiers reduce moisture and oxygen from hydrogen and silane gases to < 1 ppb. The purifier has also demonstrated the ability to remove trace levels of siloxanes and dopant metals such as As, P, Al and B from silane.
- See Related Application Bulletin: "Removal of Siloxane Impurities From Silane Gas in the Silicon Epitaxy Process" (PDF)