DFA™ Filter Assembly (Microlithography)

The DFA filter assembly is a compact capsule assembly. It is ideally suited for the filtration of developer, EBR, and DI water, as well as for small volume batch processing.

• Low hold-up volume
• Vent at highest location
• Drain at lowest location
• High flow rates
• Manufactured in a cleanroom environment
• O-ringless design
• Minimized dead space for complete and easy venting

For detailed information about this product, please refer to the data sheet. (To download this data sheet, select Download PDF from the menu above.)