High Flow Sub 1 nm HDPE Solution Reduces Defectivity in Advanced Lithography Applications
The New High Flow Sub 1 nm PE-Kleen Filter
The new filter rated as sub 1 nm is constructed of ultra-high purity, high density polyethylene (HDPE) media and high-density polyethylene (HDPE) hardware materials.
HDPE is a high-performance material known for its superior hard particle removal, making it ideal for most chemicals used in the advanced lithography processes including leading edge EUV resist materials. It offers a significant improvement in cleanliness and particle removal over traditional lithographic filter materials.
The new high flow sub -1 nm PE-Kleen filter is an additional tool for advanced lithographers to use in their defectivity reduction strategies.
The new high flow sub 1 nm PE-Kleen filter undergoes Pall’s Xpress cleaning process, which results in superior metal, organic and particulate cleanliness, specifically designed for the most advanced patterning chemistries.
The combination of high flow, the finest removal rating and the Xpress cleaning results in a superior defect reducing filter combination.
New, High Flow Sub 1 nm Rated High Density Polyethylene (HDPE) Filters
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